Integration of carrierless ultrathin wafers into a TSV process flow.

التفاصيل البيبلوغرافية
العنوان: Integration of carrierless ultrathin wafers into a TSV process flow.
المؤلفون: Bieck, F., Spiller, S., Molina, F., To?pper, M., Lopper, C., Kuna, I., Fischer, T., Roder, J., Dietrich, L., Tabuchi, T.
المصدر: 2010 12th Electronics Packaging Technology Conference (EPTC); 2010, p571-575, 5p
قاعدة البيانات: Complementary Index
الوصف
ردمك:9781424485604
DOI:10.1109/EPTC.2010.5702703