A novel Ir/IrO2/Pt-PZT-Pt/IrO2/Ir capacitor for a highly reliable mega-scale FRAM.

التفاصيل البيبلوغرافية
العنوان: A novel Ir/IrO2/Pt-PZT-Pt/IrO2/Ir capacitor for a highly reliable mega-scale FRAM.
المؤلفون: Dongjin Jung, Hyunho Kim, Yoonjong Song, Nakwon Jang, Bonjae Koo, Sungyung Lee, Soonoh Park, Yungwook Park, Kinam Kim
المصدر: International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138); 2000, p801-804, 4p
قاعدة البيانات: Complementary Index
الوصف
ردمك:9780780364387
DOI:10.1109/IEDM.2000.904439