مؤتمر
Scaling variance, invariance and prediction of design rule: from 0.25-μm to 0.10-μm nodes in the era of foundry manufacturing.
| العنوان: | Scaling variance, invariance and prediction of design rule: from 0.25-μm to 0.10-μm nodes in the era of foundry manufacturing. |
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| المؤلفون: | Doong, K.Y.-Y., Ting, J.K., Sunnys Hsieh, Lin, S.C., Binson Shen, Guo, J.C., Young, K.L., Chen, I.C., Sun, J.Y.C., Wang, J.K. |
| المصدر: | 2001 6th International Workshop on Statistical Methodology (Cat. No.01TH8550); 2001, p38-42, 5p |
| قاعدة البيانات: | Complementary Index |
Full Text Finder | ردمك: | 9780780366886 |
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| DOI: | 10.1109/IWSTM.2001.933822 |