دورية أكاديمية

Parallel Arrays of Sub-10 nm Aligned Germanium Nanofinsfrom an In Situ Metal Oxide Hardmask using Directed Self-Assemblyof Block Copolymers.

التفاصيل البيبلوغرافية
العنوان: Parallel Arrays of Sub-10 nm Aligned Germanium Nanofinsfrom an In Situ Metal Oxide Hardmask using Directed Self-Assemblyof Block Copolymers.
المؤلفون: Cian Cummins, Anushka Gangnaik, RoisinA. Kelly, Alan J. Hydes, John O’Connell, Nikolay Petkov, Yordan M. Georgiev, Dipu Borah, Justin D. Holmes, Michael A. Morris
المصدر: Chemistry of Materials; Sep2015, Vol. 27 Issue 17, p6091-6096, 6p
قاعدة البيانات: Supplemental Index
الوصف
تدمد:08974756
DOI:10.1021/acs.chemmater.5b02608