دورية أكاديمية
Parallel Arrays of Sub-10 nm Aligned Germanium Nanofinsfrom an In Situ Metal Oxide Hardmask using Directed Self-Assemblyof Block Copolymers.
العنوان: | Parallel Arrays of Sub-10 nm Aligned Germanium Nanofinsfrom an In Situ Metal Oxide Hardmask using Directed Self-Assemblyof Block Copolymers. |
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المؤلفون: | Cian Cummins, Anushka Gangnaik, RoisinA. Kelly, Alan J. Hydes, John O’Connell, Nikolay Petkov, Yordan M. Georgiev, Dipu Borah, Justin D. Holmes, Michael A. Morris |
المصدر: | Chemistry of Materials; Sep2015, Vol. 27 Issue 17, p6091-6096, 6p |
قاعدة البيانات: | Supplemental Index |
تدمد: | 08974756 |
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DOI: | 10.1021/acs.chemmater.5b02608 |