التفاصيل البيبلوغرافية
| العنوان: |
Experimental and Computational Studies of the Homogeneous Thermal Decomposition of the Tungsten Dimethylhydrazido Complexes Cl4(RCN)W(NNMe2). |
| المؤلفون: |
Jooyoung Lee, Dojun Kim, Oh Hyun Kim, Anderson, Tim, Koller, Jürgen, Denomme, Dan R., Habibi, Sophia Z., Ehsan, Mohammad, Eyler, John R., McElwee-White, Lisa |
| المصدر: |
Journal of The Electrochemical Society; 2012, Vol. 159 Issue 5, pH545-H553, 9p |
| مصطلحات موضوعية: |
CHEMICAL decomposition, TUNGSTEN, DIMETHYLHYDRAZINES, RAMAN scattering, DENSITY functional theory |
| مستخلص: |
The thermal decomposition pathways of the tungsten dimethylhydrazido complexes Cl4(RCN)W(NNMe2) (1a: R=CH3; 1b: R=Ph), precursors for single source deposition of WNxCy, were investigated using a combination of experiments and calculations. Raman scattering studies were performed in an impinging-jet, up-flow, aerosol-assisted CVD reactor to identify reaction intermediates. Density Functional Theory calculations (B3LYP/LanL2DZ) were used to estimate Raman active frequencies and explore the reaction surface. Dimethylamine and methylmethyleneimine, products from N-N cleavage of the hydrazido ligand, were observed under deposition conditions and identified by comparison with previously reported Raman shifts and calculated frequencies. [ABSTRACT FROM AUTHOR] |
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| قاعدة البيانات: |
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