دورية
Single Chemistry Cleaning Solution for Advanced Wafer Cleaning
| العنوان: | Single Chemistry Cleaning Solution for Advanced Wafer Cleaning |
|---|---|
| المؤلفون: | Vos, Rita, Doll, O., Fester, A., Kolbesen, Bernd O., Lux, Marcel, Kenis, Karine, Onsia, Bart, Degendt, S., Schellkes, E., Hatcher, Z., Mertens, Paul W., Heyns, Marc M. |
| المصدر: | Diffusion and Defect Data Part B: Solid State Phenomena; January 2001, Vol. 76 Issue: 1 p119-122, 4p |
| مستخلص: | Not Available |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 10120394 |
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| DOI: | 10.4028/www.scientific.net/SSP.76-77.119 |