التفاصيل البيبلوغرافية
| العنوان: |
Capacitive sensors in CMOS technology with polymer coating |
| المؤلفون: |
Cornila, C., Hierlemann, A., Lenggenhager, R., Malcovati, P., Baltes, H., Noetzel, G., Weimar, U., Go¨pel, W. |
| المصدر: |
Sensors and Actuators B: Chemical; April 1995, Vol. 25 Issue: 1-3 p357-361, 5p |
| مستخلص: |
In this paper we report the fabrication of a new integrated capacitive chemical sensor by industrial CMOS technology, followed by a single maskless polymer-coating step. An on-chip sigma-delta modulator measures the difference between the sensing and reference capacitors, performs offset and gain calibration and provides a digital output signal. Experimental data have been obtained in a series of measurements, in which several transducers covered with different polymer films (poly-etherurethane, PUT, polycyanopropylmethylsiloxane, PCM, ethylcellulose, EC, and polyepichlorohydrine, PECH) are exposed to various organic gases at different concentrations. The sensor signals show a clear linearity and low hysteresis for both polar and non-polar gases, thus confirming the feasibility of smart capacitive chemical sensors in IC technology. |
| قاعدة البيانات: |
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