دورية
Periodic Nano-Structure Formation with Femtosecond Laser Ablation and Patterning of Silicon
| العنوان: | Periodic Nano-Structure Formation with Femtosecond Laser Ablation and Patterning of Silicon |
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| المؤلفون: | Xu, Jian Ting, Yuan, Dong Qing |
| المصدر: | Applied Mechanics and Materials; January 2013, Vol. 275 Issue: 1 p2186-2189, 4p |
| مستخلص: | Regular micro-apparatus which covered with periodic nano-hole, nano-ridge and ripple structures on silicon bulk were formed by laser micro-machining with tightly focused beam of the femtosecond laser with wavelength of 800 nm, repetition rate of 1 kHz and the pulse length of 130 fs in air. The periodic nano-hole structures which focus with a 20× focusing objective lens (NA = 0.4) is reported. Investigating the relationship between the width of structures and the speed of processing. |
| قاعدة البيانات: | Supplemental Index |
Full Text Finder | تدمد: | 16609336 16627482 |
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| DOI: | 10.4028/www.scientific.net/AMM.275-277.2186 |