High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

التفاصيل البيبلوغرافية
العنوان: High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications
المؤلفون: Piyawattanametha, Wibool, Park, Yong-Hwa, Schmidt, Jan-Uwe, Dauderstaedt, Ulrike A., Duerr, Peter, Friedrichs, Martin, Hughes, Thomas, Ludewig, Thomas, Rudloff, Dirk, Schwaten, Tino, Trenkler, Daniela, Wagner, Michael, Wullinger, Ingo, Bergstrom, Andreas, Bjoernangen, Peter, Jonsson, Fredrik, Karlin, Tord, Ronnholm, Peter, Sandstrom, Torbjorn
المصدر: Proceedings of SPIE; March 2014, Vol. 8977 Issue: 1 p89770O-89770O-10, 8887241p
قاعدة البيانات: Supplemental Index
الوصف
تدمد:0277786X
DOI:10.1117/12.2036533