دورية
Study of the Effects of Cutting Parameters on Poly-Silicon Nano Machining
| العنوان: | Study of the Effects of Cutting Parameters on Poly-Silicon Nano Machining |
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| المؤلفون: | Zhu, Ying, Xiang, Zhi, Xie, Ling Ling, Zhang, Yin Cheng, Zhao, Jian Cun |
| المصدر: | Applied Mechanics and Materials; November 2014, Vol. 697 Issue: 1 p369-372, 4p |
| مستخلص: | The current status of nanofabrication briefly reviewed, then molecular dynamics model of poly-silicon is founded on micro-nanoscale with molecular dynamics method, in which several typical defects are distributed reasonably. Molecular dynamics simulation of nanocutting process is conducted according to the simulation model. Keeping the other conditions remain unchanged, simulating calculation is made by reasonably changing cutting parameters such as cutting velocity and cutting depth, through which the changes of the morphology structure of workpiece surface,cutting force and system potential energy are observed. The simulation results are compared and studied, then the influence laws of each parameter on morphology structure of workpiece surface, cutting force and system potential energy are analyzed. Based on this, the mechanism of poly-silicon nanomachining is discussed . |
| قاعدة البيانات: | Supplemental Index |
Full Text Finder | تدمد: | 16609336 16627482 |
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| DOI: | 10.4028/www.scientific.net/AMM.697.369 |