التفاصيل البيبلوغرافية
| العنوان: |
Hybrid enabled thin film metrology using XPS and optical |
| المؤلفون: |
Sanchez, Martha I., Ukraintsev, Vladimir A., Vaid, Alok, Iddawela, Givantha, Mahendrakar, Sridhar, Lenahan, Michael, Hossain, Mainul, Timoney, Padraig, Bello, Abner F., Bozdog, Cornel, Pois, Heath, Lee, Wei Ti, Klare, Mark, Kwan, Michael, Kang, Byung Cheol, Isbester, Paul, Sendelbach, Matthew, Yellai, Naren, Dasari, Prasad, Larson, Tom |
| المصدر: |
Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97780M-97780M-11, 9680232p |
| قاعدة البيانات: |
Supplemental Index |
