دورية
High-volume manufacturing compatible dry development rinse process (DDRP): patterning and defectivity performance for EUVL
| العنوان: | High-volume manufacturing compatible dry development rinse process (DDRP): patterning and defectivity performance for EUVL |
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| المؤلفون: | Panning, Eric M., Goldberg, Kenneth A., Sayan, Safak, Vanelderen, Pieter, Hetel, Iulian, Chan, BT, Raghavan, Praveen, Blanco, Victor, Foubert, Philippe, D'urzo, Lucia, De Simone, Danilo, Vandenberghe, Geert |
| المصدر: | Proceedings of SPIE; April 2017, Vol. 10143 Issue: 1 p101430U-101430U-8, 912879p |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2261741 |