Sub-wavelength transmission and reflection mode tabletop imaging with 13nm illumination via ptychography CDI

التفاصيل البيبلوغرافية
العنوان: Sub-wavelength transmission and reflection mode tabletop imaging with 13nm illumination via ptychography CDI
المؤلفون: Sanchez, Martha I., Ukraintsev, Vladimir A., Tanksalvala, Michael, Porter, Christina L., Gardner, Dennis F., Gerrity, Michael, Mancini, Giulia F., Zhang, Xiaoshi, Miley, Galen P., Shanblatt, Elisabeth R., Galloway, Benjamin R., Bevis, Charles S., Karl, Robert, Adams, Daniel A., Kapteyn, Henry C., Murnane, Margaret M.
المصدر: Proceedings of SPIE; March 2017, Vol. 10145 Issue: 1 p101450L-101450L-8, 913059p
قاعدة البيانات: Supplemental Index
الوصف
تدمد:0277786X
DOI:10.1117/12.2271386