دورية
Spin-on metal oxide materials for N7 and beyond patterning applications
| العنوان: | Spin-on metal oxide materials for N7 and beyond patterning applications |
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| المؤلفون: | Engelmann, Sebastian U., Wise, Rich S., Mannaert, G., Altamirano-Sanchez, E., Hopf, T., Sebaai, F., Lorant, C., Petermann, C., Hong, S.-E., Mullen, S., Wolfer, E., Mckenzie, D., Yao, H., Rahman, D., Cho, J.-Y., Padmanaban, M., Piumi, D. |
| المصدر: | Proceedings of SPIE; April 2017, Vol. 10149 Issue: 1 p101490T-101490T-8, 913419p |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2264323 |