دورية
A frequency-modulated laser interferometer for nanometer-scale position sensing at cryogenic temperatures
العنوان: | A frequency-modulated laser interferometer for nanometer-scale position sensing at cryogenic temperatures |
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المؤلفون: | Soskind, Yakov G., Christiansen, Adam J., Naylor, David A., Veenendaal, Ian T., Gom, Brad G. |
المصدر: | Proceedings of SPIE; March 2019, Vol. 10925 Issue: 1 p1092514-1092514-12 |
قاعدة البيانات: | Supplemental Index |
تدمد: | 0277786X |
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DOI: | 10.1117/12.2508900 |