دورية
A frequency-modulated laser interferometer for nanometer-scale position sensing at cryogenic temperatures
| العنوان: | A frequency-modulated laser interferometer for nanometer-scale position sensing at cryogenic temperatures |
|---|---|
| المؤلفون: | Soskind, Yakov G., Christiansen, Adam J., Naylor, David A., Veenendaal, Ian T., Gom, Brad G. |
| المصدر: | Proceedings of SPIE; March 2019, Vol. 10925 Issue: 1 p1092514-1092514-12 |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 0277786X |
|---|---|
| DOI: | 10.1117/12.2508900 |