دورية
The Electrochemical Kinetics of Selectively Corroding Poly-Silicon in Generating Lonely Crater-Defects
| العنوان: | The Electrochemical Kinetics of Selectively Corroding Poly-Silicon in Generating Lonely Crater-Defects |
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| المؤلفون: | Sheng, Lieyi, Porath, Paul, Glines, Eddie |
| المصدر: | ECS Transactions; March 2013, Vol. 50 Issue: 4 p327-332, 6p |
| مستخلص: | The electrochemical kinetics of selectively corroding poly-silicon has been elucidated for the first time in generating lonely crater-defects into the unnoticeable spots of damage due to the intermittent micro-arcing events during implantation. By largely shunting the electrochemical corrosion process in a weak electrolyte (HF), the crater-defects in poly-silicon have been eliminated for significantly improving the gate oxide integrity. |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 19385862 19386737 |
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