دورية
Analysis of the Homogeneous Thermal Decomposition of the Tungsten Dimethylhydrazido Complex Cl4(CH3CN)W(NNMe2) Using In Situ Raman Spectroscopy and DFT Calculations
العنوان: | Analysis of the Homogeneous Thermal Decomposition of the Tungsten Dimethylhydrazido Complex Cl4(CH3CN)W(NNMe2) Using In Situ Raman Spectroscopy and DFT Calculations |
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المؤلفون: | Lee, Jooyoung, Kim, Dojun, Hyun, Oh, Anderson, Tim, Koller, Jurgen, Denomme, Dan, Habibi, Sophia Z., McElwee, Lisa |
المصدر: | ECS Transactions; October 2010, Vol. 28 Issue: 15 p15-26, 12p |
مستخلص: | The gas-phase decomposition pathways of the tungsten dimethylhydrazido complexes Cl4(RCN)W(NNMe2) (1a: R = CH3; 1b: R = Ph), precursors for single source deposition of WNxCy, were investigated using a combination of experiments and calculations. Raman scattering experiments were performed in an impinging-jet, up-flow, aerosol-assisted CVD reactor to identify reaction intermediates. Density Functional Theory calculations (B3LYP/LanL2DZ) were used to estimate Raman active frequencies and explore the reaction surface. Dimethylamine and methylmethyleneimine, products from N-N cleavage of the hydrazido ligand, were observed under deposition conditions and identified by comparison with previously reported Raman shifts and calculated frequencies. |
قاعدة البيانات: | Supplemental Index |
تدمد: | 19385862 19386737 |
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