Analysis of the Homogeneous Thermal Decomposition of the Tungsten Dimethylhydrazido Complex Cl4(CH3CN)W(NNMe2) Using In Situ Raman Spectroscopy and DFT Calculations

التفاصيل البيبلوغرافية
العنوان: Analysis of the Homogeneous Thermal Decomposition of the Tungsten Dimethylhydrazido Complex Cl4(CH3CN)W(NNMe2) Using In Situ Raman Spectroscopy and DFT Calculations
المؤلفون: Lee, Jooyoung, Kim, Dojun, Hyun, Oh, Anderson, Tim, Koller, Jurgen, Denomme, Dan, Habibi, Sophia Z., McElwee, Lisa
المصدر: ECS Transactions; October 2010, Vol. 28 Issue: 15 p15-26, 12p
مستخلص: The gas-phase decomposition pathways of the tungsten dimethylhydrazido complexes Cl4(RCN)W(NNMe2) (1a: R = CH3; 1b: R = Ph), precursors for single source deposition of WNxCy, were investigated using a combination of experiments and calculations. Raman scattering experiments were performed in an impinging-jet, up-flow, aerosol-assisted CVD reactor to identify reaction intermediates. Density Functional Theory calculations (B3LYP/LanL2DZ) were used to estimate Raman active frequencies and explore the reaction surface. Dimethylamine and methylmethyleneimine, products from N-N cleavage of the hydrazido ligand, were observed under deposition conditions and identified by comparison with previously reported Raman shifts and calculated frequencies.
قاعدة البيانات: Supplemental Index