دورية
Challenge of >300W high power LPP-EUV source with long collector mirror lifetime for semiconductor HVM
| العنوان: | Challenge of >300W high power LPP-EUV source with long collector mirror lifetime for semiconductor HVM |
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| المؤلفون: | Felix, Nelson M., Lio, Anna, Mizoguchi, Hakaru, Nakarai, Hiroaki, Abe, Tamotsu, Tanaka, Hiroshi, Watanabe, Yukio, Hori, Tsukasa, Shiraishi, Yutaka, Yanagida, Tatsuya, Soumagne, Georg, Yamada, Tsuyoshi, Saitou, Takashi |
| المصدر: | Proceedings of SPIE; March 2020, Vol. 11323 Issue: 1 p113230X-113230X-14, 11209785p |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2549905 |