دورية
Machine learning for Tool Induced Shift (TIS) reduction: an HVM case study
| العنوان: | Machine learning for Tool Induced Shift (TIS) reduction: an HVM case study |
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| المؤلفون: | Adan, Ofer, Robinson, John C., Ophir, Boaz, Shusterman, Udi, Golotsvan, Anna, Kato, Cindy, Hayashi, Masanobu, Kato, Richika, Goto, Tomohiro, Kuriyama, Taketo, Miyake, Manabu, Takeuchi, Yasuki, Mizuochi, Hiroyuki |
| المصدر: | Proceedings of SPIE; February 2021, Vol. 11611 Issue: 1 p116110E-116110E-7, 1044998p |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2590247 |