دورية
Challenges of monolithic MEMS-on-CMOS integration for spatial light modulators
| العنوان: | Challenges of monolithic MEMS-on-CMOS integration for spatial light modulators |
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| المؤلفون: | Zappe, Hans, Piyawattanametha, Wibool, Park, Yong-Hwa, Hohle, Christoph, Döring, Sebastian, Friedrichs, Martin, Gehner, Andreas, Rudloff, Dirk, Schulze, Matthias, Stübner, Ronald, Trenkler, Daniela |
| المصدر: | Proceedings of SPIE; March 2021, Vol. 11697 Issue: 1 p116970V-116970V-10, 11580041p |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2583036 |