دورية
Novel technologies in coater/developer to improve the defectivity for advanced EUV patterning materials
| العنوان: | Novel technologies in coater/developer to improve the defectivity for advanced EUV patterning materials |
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| المؤلفون: | Sanders, Daniel P., Guerrero, Douglas, Kamei, Yuya, Onitsuka, Tomoya, Yamauchi, Takashi, Shiozawa, Takahiro, Kuwahara, Yuhei, Kawakami, Shinichiro, Fujimoto, Seiji, Hara, Arisa, Shimura, Satoru |
| المصدر: | Proceedings of SPIE; July 2022, Vol. 12055 Issue: 1 p120550O-120550O-7, 1084958p |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2613643 |