دورية
High-power LPP-EUV source for semiconductor HVM: lithography and other applications
| العنوان: | High-power LPP-EUV source for semiconductor HVM: lithography and other applications |
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| المؤلفون: | Itani, Toshiro, Naulleau, Patrick P., Gargini, Paolo A., Ronse, Kurt G., Mizoguchi, Hakaru, Nakarai, Hiroaki, Usami, Yasutsugu, Kakizaki, Kouji, Fujimoto, Junichi, Saitou, Takashi |
| المصدر: | Proceedings of SPIE; December 2022, Vol. 12292 Issue: 1 p122920X-122920X-6, 1106287p |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2657787 |