دورية
Assessment of contour modeling readiness for curvilinear masks
| العنوان: | Assessment of contour modeling readiness for curvilinear masks |
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| المؤلفون: | Kasprowicz, Bryan S., Liang, Ted, Yi, Raewon, Lee, Sukho, Choi, Jin, Kim, Eok Bong, Lee, Sanghee |
| المصدر: | Proceedings of SPIE; December 2022, Vol. 12293 Issue: 1 p1229308-1229308-6 |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2641692 |