دورية
EUV ptychography: material-specific imaging at the nanoscale
| العنوان: | EUV ptychography: material-specific imaging at the nanoscale |
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| المؤلفون: | Stella, Ettore, Soldovieri, Francesco, Ceglarek, Dariusz, Kemao, Qian, Rothhardt, J., Eschen, Wilhelm, Liu, Cheng, Penagos M., Daniel S., Klas, Robert, Limpert, Jens |
| المصدر: | Proceedings of SPIE; August 2023, Vol. 12621 Issue: 1 p126210V-126210V-4, 1135895p |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2678398 |