دورية
EUV mask patterning process to enable opaque SRAFs for bright field EUV mask imaging
| العنوان: | EUV mask patterning process to enable opaque SRAFs for bright field EUV mask imaging |
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| المؤلفون: | Liang, Ted, Kim, Seong-Sue, Green, Michael, Halle, Scott, Ramadan, Mohamed, Lallement, Romain, Kamberian, Henry, Burkhardt, Martin, Beineke, Jinju, Rankin, Jed, Progler, Chris, McDermott, Steven |
| المصدر: | Proceedings of SPIE; November 2023, Vol. 12751 Issue: 1 p127510M-127510M-9, 1147600p |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2689665 |