دورية
Hard failure prediction of ADI pattern using optical parameters and machine learning
| العنوان: | Hard failure prediction of ADI pattern using optical parameters and machine learning |
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| المؤلفون: | Burkhardt, Martin, van Lare, Claire, Cho, Yeongchan, Choi, Seongjeon, Lee, Wonchan, Ahn, Hungbae, Park, Sangoh, Kim, Dongho, Yang, Seunghune |
| المصدر: | Proceedings of SPIE; April 2024, Vol. 12953 Issue: 1 p129530D-129530D-6, 1165777p |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.3010633 |