دورية
Roughness improvement by post-development treatment of CAR for high-NA EUV lithography
| العنوان: | Roughness improvement by post-development treatment of CAR for high-NA EUV lithography |
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| المؤلفون: | Guerrero, Douglas, Amblard, Gilles R., Cho, Kayoko, Tomori, Hikari, Dinh, Cong Que, Nagahara, Seiji, Hara, Arisa, Fujimoto, Seiji, Dauendorffer, Arnaud, Huli, Lior, Kato, Kanzo, Antonovich, Nathan, Muramatsu, Makoto |
| المصدر: | Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129571Q-129571Q-9, 1166149p |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.3010231 |