التفاصيل البيبلوغرافية
| العنوان: |
E-beam simulation for advanced SEM applications in semiconductor industry |
| المؤلفون: |
Sendelbach, Matthew J., Schuch, Nivea G., Cheon, Wooyoung, Moon, Taejin, Kwon, In, Lee, Jinwoo, Lee, Jaeyong, Kwon, Yongjae, Ramu, Ashok, Jin, Seonghoon, Yukihide, Tsuji, Chae, Hyunwoo, Park, Chulwoo, Choi, Hyunsuk, Lee, Kwangseok, Ahn, Byungseong, Yang, Jaehun, Ma, Ami, Kim, Qhwan, Im, Donghyeok, Bae, Jaehyun, Sun, Jongcheon, Lee, Su-Young, Yi, Shinwook, Doh, Jiseong, Chang, Kyu Baik, Han, Songyi, Jeong, Jaehoon, Yang, Yusin, Kim, Dae Sin |
| المصدر: |
Proceedings of SPIE; April 2024, Vol. 12955 Issue: 1 p129551J-129551J-7, 1165967p |
| قاعدة البيانات: |
Supplemental Index |
