In high-accuracy motion stages, the positioning accuracy at the point of interest is strongly influenced by guiding errors: for translation motions, straightness errors and angular errors (pitch, yaw and roll); for rotation motions, axial, radial and tilt errors. When air bearings are used for guiding, the air film averages out local irregularities of bearings surfaces, which helps reduce guiding errors considerably. Some results obtained with air bearing precision systems designed and manufactured by specialized companies and tested at ESRF are described below.
