Targeted Sample Preparation and Analysis of Advanced Packaging using Correlated X-Ray Microscopy and Laser FIB
| العنوان: | Targeted Sample Preparation and Analysis of Advanced Packaging using Correlated X-Ray Microscopy and Laser FIB |
|---|---|
| المؤلفون: | Vignesh Viswanathan, Etsuo Maeda, Chisato Yamamoto, Takehide Oda, Longan Jiao |
| المصدر: | 2022 IEEE CPMT Symposium Japan (ICSJ). |
| بيانات النشر: | IEEE, 2022. |
| سنة النشر: | 2022 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::02ef8b6d0e43474a556efcbcae34afbf https://doi.org/10.1109/icsj55786.2022.10034689 |
| حقوق: | CLOSED |
| رقم الأكسشن: | edsair.doi...........02ef8b6d0e43474a556efcbcae34afbf |
| قاعدة البيانات: | OpenAIRE |
| الوصف غير متاح. |