Structural Properties of MgO Films Deposited on Si(100) Substrates by Using a Combined RF Magnetron Sputtering and Sol-Gel Process
| العنوان: | Structural Properties of MgO Films Deposited on Si(100) Substrates by Using a Combined RF Magnetron Sputtering and Sol-Gel Process |
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| المؤلفون: | Yi Da Yang, Hong Seung Kim, Young Yun, Nak-Won Jang |
| المصدر: | New Physics: Sae Mulli. 67:136-141 |
| بيانات النشر: | Korean Physical Society, 2017. |
| سنة النشر: | 2017 |
| مصطلحات موضوعية: | Materials science, Chemical engineering, General Physics and Astronomy, Sputter deposition, Sol-gel |
| تدمد: | 2289-0041 0374-4914 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::041c8e9c1d5ce5f77c3568c660a43cee https://doi.org/10.3938/npsm.67.136 |
| رقم الأكسشن: | edsair.doi...........041c8e9c1d5ce5f77c3568c660a43cee |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 22890041 03744914 |
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