التفاصيل البيبلوغرافية
| العنوان: |
Effects of grinding-induced surface topography on the material removal mechanism of silicon chemical mechanical polishing |
| المؤلفون: |
Hongfei Tao, Qinyang Zeng, Yuanhang Liu, Dewen Zhao, Xinchun Lu |
| المصدر: |
Applied Surface Science. 631:157509 |
| بيانات النشر: |
Elsevier BV, 2023. |
| سنة النشر: |
2023 |
| مصطلحات موضوعية: |
General Physics and Astronomy, Surfaces and Interfaces, General Chemistry, Condensed Matter Physics, Surfaces, Coatings and Films |
| تدمد: |
0169-4332 |
| URL الوصول: |
https://explore.openaire.eu/search/publication?articleId=doi_________::094e70961cda664f5a81140c57e939d8
https://doi.org/10.1016/j.apsusc.2023.157509 |
| حقوق: |
CLOSED |
| رقم الأكسشن: |
edsair.doi...........094e70961cda664f5a81140c57e939d8 |
| قاعدة البيانات: |
OpenAIRE |
