W e present experimental stud ies of live cancer cells via microscopic imaging ellipsometry (MIE). The Rotating Compensator Ellipsometry (RCE) is used for our measurements. Ellipsometry spectra with signal integrated over a s P % PDUHDLQYLVLEOHUDQJH QPWR 5 0nm) are obtained with the Optrel MULTISKOP system for both specular reflection and off-specular scattering. The microscopic ellipsometry (ME) images at a few fixed wavel engths within the same range w ere also analyzed. Dielectric constants for glass slide, culture fluid, and glass cover plate were firstly characterized by spectroscopic ellipsometry measurements, which can be used in the simulation for MIE measurements of cancer cells embedded in the culture fluid and sandwiched between a glass slide and cover plate. The measured ME spectra and images of cancer cells before and after medicine injection are measured and analyzed . Keywords: spectroscopic ellipsometry , microscopic imaging, biosensing *corresponding a uthor: yiachang @gate.sinica.edu.tw
