Displacement and Thermal Performance of Laser-Heated Asymmetric MEMS Actuators
| العنوان: | Displacement and Thermal Performance of Laser-Heated Asymmetric MEMS Actuators |
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| المؤلفون: | J.R. Serrano, Leslie M. Phinney |
| المصدر: | Journal of Microelectromechanical Systems. 17:166-174 |
| بيانات النشر: | Institute of Electrical and Electronics Engineers (IEEE), 2008. |
| سنة النشر: | 2008 |
| مصطلحات موضوعية: | Microelectromechanical systems, Materials science, business.industry, Mechanical Engineering, Physics::Optics, Optical power, engineering.material, Laser, Temperature measurement, Computer Science::Other, law.invention, Surface micromachining, Optics, Polycrystalline silicon, law, engineering, Laser power scaling, Electrical and Electronic Engineering, Actuator, business |
| الوصف: | Optical actuators are fundamental building blocks in the development of all-optical microelectromechanical devices. Photothermally actuated devices are inevitably limited by overheating and device damage resulting from the absorption of laser power. Optimal actuator design requires an efficient use of the applied laser power while minimizing the susceptibility of device damage. Surface micromachined polycrystalline silicon flexure-style optical actuators, which are powered using an 808-nm continuous-wave laser, were evaluated for displacement performance and susceptibility to damage. Actuator displacement is linear with incident power for laser powers below those that cause damage to the irradiated surface, up to a maximum displacement of 7-9 mum. Damage of the irradiated surface causes viscous relaxation of the polysilicon film and leads to recession of the displacement during the heating and additional recession after the optical power is removed. The first spatially resolved temperature measurements during device operation were obtained using micro-Raman thermometry. The temperature measurements revealed the influence of temperature-dependent optical properties in the thermal behavior of the irradiated devices. |
| تدمد: | 1941-0158 1057-7157 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::0ca4ebd620312eda74d710f7a061b50c https://doi.org/10.1109/jmems.2007.911945 |
| حقوق: | CLOSED |
| رقم الأكسشن: | edsair.doi...........0ca4ebd620312eda74d710f7a061b50c |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 19410158 10577157 |
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