Fourier Analysis of Interference Structure in X-Ray Specular Reflection from Thin Films
| العنوان: | Fourier Analysis of Interference Structure in X-Ray Specular Reflection from Thin Films |
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| المؤلفون: | Atsuo Iida, Kenji Sakurai |
| المصدر: | Japanese Journal of Applied Physics. 31:L113 |
| بيانات النشر: | IOP Publishing, 1992. |
| سنة النشر: | 1992 |
| مصطلحات موضوعية: | Chemistry, business.industry, General Engineering, General Physics and Astronomy, Synchrotron radiation, Surface finish, X-ray reflectivity, symbols.namesake, Fourier transform, Optics, Fourier analysis, Total external reflection, symbols, Specular reflection, Thin film, business |
| الوصف: | Interference oscillation observed in X-ray total external reflection from thin films was analyzed by the Fourier transform algorithm. The peak position in Fourier space was in good agreement with the layer thickness, and was determined independently from the surface/interface roughness. The principle of the present technique and its application to SiO2/Si thin films are shown. The advantages of the experiments using tunable synchrotron X-rays are also discussed. |
| تدمد: | 1347-4065 0021-4922 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::0e90553f3ed90ce3a9e105c0c47cf912 https://doi.org/10.1143/jjap.31.l113 |
| حقوق: | CLOSED |
| رقم الأكسشن: | edsair.doi...........0e90553f3ed90ce3a9e105c0c47cf912 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 13474065 00214922 |
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