Deep-hole drilling of amorphous silica glass by extreme ultraviolet femtosecond pulses
| العنوان: | Deep-hole drilling of amorphous silica glass by extreme ultraviolet femtosecond pulses |
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| المؤلفون: | Yuya Koshiba, Kazuyuki Sakaue, Thanh Hung Dinh, Masahito Tanaka, Hiroshi Ogawa, Hiroyuki Hara, Tatsunori Shibuya, Yohei Kobayashi, Takashi Takahashi, Ryunosuke Kuroda, Masahiko Ishino, Masaharu Nishikino, Masakazu Washio, Takeshi Higashiguchi |
| المصدر: | Applied Physics Letters. 113:171902 |
| بيانات النشر: | AIP Publishing, 2018. |
| سنة النشر: | 2018 |
| مصطلحات موضوعية: | 010302 applied physics, Materials science, Physics and Astronomy (miscellaneous), business.industry, Near-infrared spectroscopy, Attenuation length, 02 engineering and technology, 021001 nanoscience & nanotechnology, Laser, 01 natural sciences, Fluence, law.invention, Wavelength, Optics, Deep hole drilling, law, Extreme ultraviolet, 0103 physical sciences, Femtosecond, 0210 nano-technology, business |
| الوصف: | A free-electron laser (FEL) is a robust tool for studying the interaction of intense X-rays with matter. In this study, we investigate the damage threshold and morphology of fused silica irradiated by extreme ultraviolet femtosecond pulses of a FEL. The experimental results indicate the superiority of the FEL processing. The FEL-damage threshold of fused silica at a wavelength of 13.5 nm is 0.17 J/cm2, which is 20 times lower than that of a near infrared (NIR) femtosecond laser. The relationship between the crater depth and laser fluence reveals that the effective absorption length is αeff−1 = 58 nm. The damage threshold and the absorption length are the key values for smooth crater formation. In addition, the formation of rim structures and microcracks, which are usually the critical issues in NIR laser processing, cannot be found in the interaction region. The hole diameter is maintained below the beam size at the exit. |
| تدمد: | 1077-3118 0003-6951 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::16350f63449cd1ec8b842cab3ede23c9 https://doi.org/10.1063/1.5046125 |
| رقم الأكسشن: | edsair.doi...........16350f63449cd1ec8b842cab3ede23c9 |
| قاعدة البيانات: | OpenAIRE |
Find this article in full text from Scitation. | تدمد: | 10773118 00036951 |
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