Laser-Written Silicon-Germanium Alloy Microstructures with Tunable Compositionally Graded Profiles

التفاصيل البيبلوغرافية
العنوان: Laser-Written Silicon-Germanium Alloy Microstructures with Tunable Compositionally Graded Profiles
المؤلفون: Anna C. Peacock, Harold M. H. Chong, Swe Zin Oo, Vinita Mittal, Ozan Aktas, Stuart J. MacFarquhar
المصدر: Conference on Lasers and Electro-Optics.
بيانات النشر: Optica Publishing Group, 2020.
سنة النشر: 2020
مصطلحات موضوعية: Materials science, Silicon, Scanning electron microscope, business.industry, Alloy, chemistry.chemical_element, 02 engineering and technology, engineering.material, 021001 nanoscience & nanotechnology, Laser, 01 natural sciences, law.invention, Semiconductor laser theory, Silicon-germanium, Amorphous solid, 010309 optics, chemistry.chemical_compound, chemistry, law, 0103 physical sciences, engineering, Optoelectronics, Thin film, 0210 nano-technology, business
الوصف: A laser processing method is introduced for post-deposition tailoring of local composition and bandgap in amorphous silicon-germanium thin films on silicon substrates. Spatial distribution of the alloy constituents can be controlled through the scan speed.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1b0dba127559e57da450b255309449e7
https://doi.org/10.1364/cleo_si.2020.sf2r.5
حقوق: OPEN
رقم الأكسشن: edsair.doi...........1b0dba127559e57da450b255309449e7
قاعدة البيانات: OpenAIRE