Spatially-separated and photo-enhanced semiconductor corrosion processes for high-efficient and contamination-free electrochemical nanoimprint lithography
| العنوان: | Spatially-separated and photo-enhanced semiconductor corrosion processes for high-efficient and contamination-free electrochemical nanoimprint lithography |
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| المؤلفون: | Hantao Xu, Lianhuan Han, Jian-Jia Su, Zhong-Qun Tian, Dongping Zhan |
| المصدر: | Science China Chemistry. 65:810-820 |
| بيانات النشر: | Springer Science and Business Media LLC, 2022. |
| سنة النشر: | 2022 |
| مصطلحات موضوعية: | General Chemistry |
| تدمد: | 1869-1870 1674-7291 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::1d6b13ed2f441f0750e6891c8c669dc4 https://doi.org/10.1007/s11426-021-1194-3 |
| حقوق: | CLOSED |
| رقم الأكسشن: | edsair.doi...........1d6b13ed2f441f0750e6891c8c669dc4 |
| قاعدة البيانات: | OpenAIRE |
Find this article in full text from Springer Verlag. | تدمد: | 18691870 16747291 |
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