Automated TEM Workflow for Inline Defect Characterization
| العنوان: | Automated TEM Workflow for Inline Defect Characterization |
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| المؤلفون: | Taehun Lee, Hyun Woo Shim, Jonghan Kwon |
| المصدر: | International Symposium for Testing and Failure Analysis. |
| بيانات النشر: | ASM International, 2021. |
| سنة النشر: | 2021 |
| مصطلحات موضوعية: | Workflow, business.industry, Computer science, Embedded system, business, Characterization (materials science) |
| الوصف: | This study shows that a high-volume TEM workflow can be achieved for inline defect characterization by adding a defect marking step using commercially available tools. A simple user-assisted defect marking procedure added to a conventional automated ex-situ lift-out TEM workflow increased throughput by a factor of nearly three and reduced man-hours by an order of magnitude, a significant improvement over conventional TEM workflows. |
| تدمد: | 0890-1740 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::22b1eda1a29c61d8c0f3e7cf34bcec91 https://doi.org/10.31399/asm.cp.istfa2021p0126 |
| حقوق: | OPEN |
| رقم الأكسشن: | edsair.doi...........22b1eda1a29c61d8c0f3e7cf34bcec91 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 08901740 |
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