التفاصيل البيبلوغرافية
العنوان:
Modes of propagating light waves in thin films of boron nitride deposited by plasma enhanced chemical vapor deposition
المؤلفون:
P. Thevenin , O. Baehr , J. Boudiombo , A. Boudrioua , A. Bath , J. C. Loulergue
المصدر:
Materials Science and Engineering: B . 46:96-98
بيانات النشر:
Elsevier BV, 1997.
سنة النشر:
1997
مصطلحات موضوعية:
Materials science , business.industry , Band gap , Mechanical Engineering , Physics::Optics , Combustion chemical vapor deposition , Condensed Matter Physics , law.invention , Condensed Matter::Materials Science , chemistry.chemical_compound , Optics , Carbon film , chemistry , Mechanics of Materials , law , Plasma-enhanced chemical vapor deposition , Boron nitride , Condensed Matter::Superconductivity , Optoelectronics , General Materials Science , Thin film , business , Waveguide , Refractive index
الوصف:
Waveguide films of boron nitride are fabricated by a plasma enhanced chemical vapor deposition (PECVD) process. Optical properties of films are investigated. Effective refractive indices of guided modes are used to determine refractive index and film thickness. A good optical quality has been obtained with an hexagonal structure.
تدمد:
0921-5107
URL الوصول:
https://explore.openaire.eu/search/publication?articleId=doi_________::2cb5de7c22bf472f6ff52487469bab31 https://doi.org/10.1016/s0921-5107 (96)01940-x
حقوق:
CLOSED
رقم الأكسشن:
edsair.doi...........2cb5de7c22bf472f6ff52487469bab31
قاعدة البيانات:
OpenAIRE
