Three sets of a vacuum system were developed and fabricated for elliptically polarized undulators (EPU) of a 3-GeV synchrotron facility. These chambers were shaped with low roughness extrusion and oil-free machining; the design combines aluminium and stainless steel. The use of a bimetallic material to connect the EPU to the vacuum system achieves the vacuum sealing and to resolve the leakage issue due to bake process induced thermal expansion difference. The interior of the EPU chamber consists of a non-evaporable-getter strip pump in a narrow space to absorb photon-stimulated desorption and to provide a RF bridge design to decrease impedance effect in the two ends of EPU chamber. To fabricate these chambers and to evaluate the related performance, we performed a computer simulation to optimize the structure. During the machining and welding, the least deformation was achieved, less than 0.1 mm near 4 m. In the installation, the linear slider can provide a stable and precision moved along parallel the electron beam direction smoothly for the EPU chamber to decrease the twist issue during baking process. The pressure of the EPU chamber attained less than 2×10 −8 Pa through baking. These vacuum systems of the EPU magnet have been installed in the electron storage ring of Taiwan Photon Source in 2015 May and have normally operated at 300 mA continuously since, and to keep beam life time achieved over than 12 h.