Demonstration of Ultra-thin Ferroelectric/dielectric and Anti-ferroelectric/dielectric Bilayers for Future DRAM Cell Capacitors

التفاصيل البيبلوغرافية
العنوان: Demonstration of Ultra-thin Ferroelectric/dielectric and Anti-ferroelectric/dielectric Bilayers for Future DRAM Cell Capacitors
المؤلفون: Dong Ik Suh, Won-Tae Koo, Youngmo Kim, Ja-Yong Kim, Seung Wook Ryu, Heeyoung Jeon, Ki Vin Im, Gwangyeob Lee, Taeone Youn, Hyeonho Jeong, Seho Lee, Myung-Hee Na, Seon Yong Cha
المصدر: 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM).
بيانات النشر: IEEE, 2023.
سنة النشر: 2023
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3a1efd0b90f47471c08fe8fa689b091e
https://doi.org/10.1109/edtm55494.2023.10102993
حقوق: CLOSED
رقم الأكسشن: edsair.doi...........3a1efd0b90f47471c08fe8fa689b091e
قاعدة البيانات: OpenAIRE