In this article a series of Stainless steel thin films are fabricated by DC power magnetron sputtering of a SUS316 stainless steel target at various argon working pressure. The sample film compositions retain that of an austenitic stainless steel, while XRD spectra reveal that all films possess a single phase, body-centered cubic ferrite crystal structure. At working pressure 6 mTorr and above, the film exhibits a textured surface morphology made up of nano-sized pyramids. Cross-sectional images show that increasing argon pressure cause a microstructural evolution from dense, fibrous grain to coarse tapered grains. This observation agrees with the prediction by Thornton's structural zone model and causes a drastic reduction in static water contact angle (WCA) from ~65° to ~17°. With further increase of argon pressure, a minimum WCA of 11° at 8 mTorr can be achieved. In addition, our textured film deposited at 12 mTorr exhibits both excellent hydrophilicity and low contact angle hysteresis (CAH) at the same time. In summary, this work reports a convenient way of depositing a stainless steel-like hydrophilic coating, in which the wetting properties are tunable via working pressure control.
