Surface Condition of Zn Target in a DC Reactive Magnetron Sputtering Plasma Source Using Water Vapor Plasma
| العنوان: | Surface Condition of Zn Target in a DC Reactive Magnetron Sputtering Plasma Source Using Water Vapor Plasma |
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| المؤلفون: | Allen Vincent CATAPANG, Hirotaka TATEMATSU, Oliver M. STREETER, James A. HERNANDEZ II, Magdaleno R. VASQUEZ Jr., Motoi WADA |
| المصدر: | Plasma and Fusion Research. 17:2406040-2406040 |
| بيانات النشر: | Japan Society of Plasma Science and Nuclear Fusion Research, 2022. |
| سنة النشر: | 2022 |
| مصطلحات موضوعية: | Condensed Matter Physics |
| تدمد: | 1880-6821 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::411881edd69bf65d304062b6d28283eb https://doi.org/10.1585/pfr.17.2406040 |
| رقم الأكسشن: | edsair.doi...........411881edd69bf65d304062b6d28283eb |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 18806821 |
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