Production scale deposition of multilayer film structures for birefringent optical components

التفاصيل البيبلوغرافية
العنوان: Production scale deposition of multilayer film structures for birefringent optical components
المؤلفون: Ralf Erz, Karen Denise Hendrix, Markus K. Tilsch, Rick Bradley, David M. Shemo, Kim Leong Tan, Joerg Buth
المصدر: Thin Solid Films. 516:107-113
بيانات النشر: Elsevier BV, 2007.
سنة النشر: 2007
مصطلحات موضوعية: 3D optical data storage, Liquid-crystal display, Materials science, Birefringence, business.industry, Metals and Alloys, Optical communication, Surfaces and Interfaces, Polarization (waves), Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, Metrology, Optics, law, Liquid crystal, Materials Chemistry, Wafer, business
الوصف: Many modern optical systems require polarization control of light in addition to spectral control. Light modulation applications include displays, optical data storage, digital imaging, metrology, instrumentation, optical communications and others. Within the information display sector, liquid crystal displays with polarization control components are prevalent. These components are often close to an image plane and thus have stringent defect requirements. Use of these components to control contrast and modulation drives the requirement of uniformity and part-to-part consistency. In a birefringent material the interaction of light with matter depends on the polarization state and orientation of the material. Bulk materials like quartz possess crystalline structures and hence exhibit molecular birefringence. Liquid crystal materials, stretched foils, and obliquely deposited columnar films are examples of engineered materials that have a microstructure or molecular orientation that creates birefringence. But even a stack of thin isotropic layers has birefringent properties when illuminated at non-normal incidence angle. We discuss two deposition technologies which JDSU has scaled into volume production. The first is based on liquid crystal polymers and the second on vacuum multilayer thin-film deposition. Production scale deposition requires high throughput, high uniformity, batch-to-batch reproducibility, and low defect capability. Both processes are standardized on 200 mm wafers, which allows for modular manufacturing within the same work cell and clean room. The two technologies are used together to create specifically tailored birefringent optics. Independent control of in-plane and out-of-plane retardance is enabled. Excellent layer thickness control, knowledge of the optical properties, and suitable metrology enable JDSU to adjust processes to address various customer needs in a rapid manner.
تدمد: 0040-6090
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4b19d2136d69de338a495d821a558c7e
https://doi.org/10.1016/j.tsf.2007.06.103
حقوق: CLOSED
رقم الأكسشن: edsair.doi...........4b19d2136d69de338a495d821a558c7e
قاعدة البيانات: OpenAIRE