Exploration of the ultimate patterning potential achievable with high resolution focused ion beams
| العنوان: | Exploration of the ultimate patterning potential achievable with high resolution focused ion beams |
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| المؤلفون: | A. Perez, V. Mathet, R. Hyndman, Dominique Mailly, Jacques Ferré, L. Bardotti, Peter Hawkes, B. Prével, L. Bruchhaus, J. N. Chapman, Alexandra Mougin, P. Warin, J.-P. Jamet, Patrice Mélinon, Claude Chappert, Ralf Jede, Jacques Gierak |
| المصدر: | Applied Physics A. 80:187-194 |
| بيانات النشر: | Springer Science and Business Media LLC, 2005. |
| سنة النشر: | 2005 |
| مصطلحات موضوعية: | Fabrication, Materials science, business.industry, chemistry.chemical_element, Nanotechnology, General Chemistry, Focused ion beam, Ion, Pencil (optics), chemistry, Optoelectronics, General Materials Science, Graphite, Irradiation, Gallium, Thin film, business |
| الوصف: | Controlled and reproducible fabrication of nano-structured materials will be one of the main industrial challenges in the next few years. We have recently proposed exploitation of the nano-structuring potential of a high resolution Focused Ion Beam Tool, to overcome basic limitations of current nano-fabrication techniques. The aim of this article is to present some new routes for material patterning, which benefit from ion-induced local property modifications or damage. In the experiments we describe hereafter an ultra-sharp pencil of 30 keV gallium ions is used to tailor the characteristics of several materials at a scale of a few nanometres. The experimental results are then compared to simulations. First, we simulate the control of collisional defects generated in a thin magnetic layer under FIB irradiation. The results explain the stable magnetic structures we have obtained experimentally. This was achieved with a low surface ion dose (1012 to 1014 ions/cm2). In addition we have explored the promising direction of “Bottom-up” or “self-organization” processes using a FIB instrument. We have defined artificial surface defects. These defects created by the impact of an 8-nm FWHM probe were used to pin the diffusion and to organize nanometre-sized gold clusters on a graphite surface. |
| تدمد: | 1432-0630 0947-8396 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::4d13c58f9bc0fa642f358c3c8f7e8008 https://doi.org/10.1007/s00339-004-2551-z |
| حقوق: | CLOSED |
| رقم الأكسشن: | edsair.doi...........4d13c58f9bc0fa642f358c3c8f7e8008 |
| قاعدة البيانات: | OpenAIRE |
Find this article in full text from Springer Verlag. | تدمد: | 14320630 09478396 |
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