Electric-Field and Mechanical Vibration-Assisted Atomic Force Microscope-Based Nanopatterning
| العنوان: | Electric-Field and Mechanical Vibration-Assisted Atomic Force Microscope-Based Nanopatterning |
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| المؤلفون: | Huimin Zhou, Yingchun Jiang, Changhong Ke, Jia Deng |
| المصدر: | Journal of Micro and Nano-Manufacturing. 10 |
| بيانات النشر: | ASME International, 2022. |
| سنة النشر: | 2022 |
| مصطلحات موضوعية: | Mechanics of Materials, Process Chemistry and Technology, Industrial and Manufacturing Engineering |
| الوصف: | Atomic force microscope (AFM)-based nanolithography is a cost-effective nanopatterning technique that can fabricate nanostructures with arbitrary shapes. However, existing AFM-based nanopatterning approaches have limitations in the patterning resolution and efficiency. Minimum feature size and machining performance in the mechanical force-induced nanofabrication process are limited by the radius and sharpness of the AFM tip. Electric-field-assisted atomic force microscope (E-AFM) nanolithography can fabricate nanopatterns with features smaller than the tip radius, but it is very challenging to find the appropriate input parameter window. The tip bias range in E-AFM process is typically very small and varies for each AFM tip due to the variations in tip geometry, tip end diameter, and tip conductive coating thickness. This paper demonstrates a novel electric-field and mechanical vibration-assisted AFM-based nanofabrication approach, which enables high-resolution (sub-10 nm toward sub-5 nm) and high-efficiency nanopatterning processes. The integration of in-plane vibration with the electric field increases the patterning speed, broadens the selectable ranges of applied voltages, and reduces the minimum tip bias required for nanopatterning as compared with E-AFM process, which significantly increases the versatility and capability of AFM-based nanopatterning and effectively avoids the tip damage. |
| تدمد: | 2166-0476 2166-0468 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::5167b84dd826f7da3acc31628af29b27 https://doi.org/10.1115/1.4056731 |
| حقوق: | CLOSED |
| رقم الأكسشن: | edsair.doi...........5167b84dd826f7da3acc31628af29b27 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 21660476 21660468 |
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