TEM investigations of gate-all-around nanowire devices
العنوان: | TEM investigations of gate-all-around nanowire devices |
---|---|
المؤلفون: | Roger Loo, Hans Mertens, Hugo Bender, E. Capogreco, P Kundu, O. Richard, Liesbeth Witters, Andriy Hikavyy, Hiroaki Arimura, E. Vancoille, Geert Eneman, Paola Favia |
المصدر: | Semiconductor Science and Technology. 34:124003 |
بيانات النشر: | IOP Publishing, 2019. |
سنة النشر: | 2019 |
مصطلحات موضوعية: | Materials science, Strain (chemistry), business.industry, Transmission electron microscopy, Materials Chemistry, Nanowire, Optoelectronics, Electrical and Electronic Engineering, Condensed Matter Physics, business, Electronic, Optical and Magnetic Materials |
تدمد: | 1361-6641 0268-1242 |
URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::521aec76826ba8e9a63db1c96f3dadd3 https://doi.org/10.1088/1361-6641/ab4b8b |
حقوق: | CLOSED |
رقم الأكسشن: | edsair.doi...........521aec76826ba8e9a63db1c96f3dadd3 |
قاعدة البيانات: | OpenAIRE |
تدمد: | 13616641 02681242 |
---|