TEM investigations of gate-all-around nanowire devices

التفاصيل البيبلوغرافية
العنوان: TEM investigations of gate-all-around nanowire devices
المؤلفون: Roger Loo, Hans Mertens, Hugo Bender, E. Capogreco, P Kundu, O. Richard, Liesbeth Witters, Andriy Hikavyy, Hiroaki Arimura, E. Vancoille, Geert Eneman, Paola Favia
المصدر: Semiconductor Science and Technology. 34:124003
بيانات النشر: IOP Publishing, 2019.
سنة النشر: 2019
مصطلحات موضوعية: Materials science, Strain (chemistry), business.industry, Transmission electron microscopy, Materials Chemistry, Nanowire, Optoelectronics, Electrical and Electronic Engineering, Condensed Matter Physics, business, Electronic, Optical and Magnetic Materials
تدمد: 1361-6641
0268-1242
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::521aec76826ba8e9a63db1c96f3dadd3
https://doi.org/10.1088/1361-6641/ab4b8b
حقوق: CLOSED
رقم الأكسشن: edsair.doi...........521aec76826ba8e9a63db1c96f3dadd3
قاعدة البيانات: OpenAIRE