التفاصيل البيبلوغرافية
| العنوان: |
Electrically Testable Product Macro Multi-via Measurement for Within Die CD Variation |
| المؤلفون: |
Carol Boye, DukKyun Moon, Steven McDermott, Norbert Arnold, Nicole Saulnier, Felix Levitov, Sam Choi, Alex Goldenshtein, Uri Smolyan, Noam Amit, Injo Ok, Iqbal Saraf |
| المصدر: |
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). |
| بيانات النشر: |
IEEE, 2022. |
| سنة النشر: |
2022 |
| URL الوصول: |
https://explore.openaire.eu/search/publication?articleId=doi_________::52bc90878a883049cac5651f227b2459
https://doi.org/10.1109/asmc54647.2022.9792525 |
| حقوق: |
CLOSED |
| رقم الأكسشن: |
edsair.doi...........52bc90878a883049cac5651f227b2459 |
| قاعدة البيانات: |
OpenAIRE |
