Features of the Formation of Ripple Structures on the Surface of Silicon under Irradiation with a Focused Gallium Ion Beam
| العنوان: | Features of the Formation of Ripple Structures on the Surface of Silicon under Irradiation with a Focused Gallium Ion Beam |
|---|---|
| المؤلفون: | M. A. Smirnova, V. I. Bachurin, L. A. Mazaletsky, D. E. Pukhov, A. B. Churilov, A. S. Rudy |
| المصدر: | Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 15:S150-S156 |
| بيانات النشر: | Pleiades Publishing Ltd, 2021. |
| سنة النشر: | 2021 |
| مصطلحات موضوعية: | Surfaces, Coatings and Films |
| تدمد: | 1819-7094 1027-4510 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::566dad2fe937ebd93491cf126080987e https://doi.org/10.1134/s1027451022020380 |
| حقوق: | CLOSED |
| رقم الأكسشن: | edsair.doi...........566dad2fe937ebd93491cf126080987e |
| قاعدة البيانات: | OpenAIRE |
Find this article in full text from Springer Verlag. | تدمد: | 18197094 10274510 |
|---|